Thermal mass flowmeter (controller) precautions in use

2024-08-08

Thermal mass flowmeter should be used in an environment that meets the environmental conditions and technical regulations specified in the manual.


  (1) When the instrument is used, the operating environment should meet the environmental conditions and technical , and the maximum flow rate should be within the specified range of the selected instrument.

  (2) In order to ensure the easy operation and maintenance of MFM/MFC, the instrument should be equipped with appropriate cut-off, filter, dryer, check valve, pressure reducer and back pressure.

  (3) Since the instrument is prone to clogging, the "cleaning" process should be frequently activated and the matching filter should be cleaned regularly during use.

  (4) When performing a "cleaning" operation during use, do not directly turn it to the "valve control" position when "cleaning" is completed. It should first be placed in the "closed" position, and then turned to the "control" position.

  (5) For the reaction system, it is recommended to install a filter at the inlet of the MFM/MFC and a unidirectional layer at the outlet to prevent liquid reactants from flowing back into the instrument and causing damage when abnormal conditions occur.

  (6) For normal pressure systems, pressure reducers and filters are generally selected to match them to ensure the operability and control accuracy of the instrument.

  (7) For high-pressure systems, a pressure reducing valve and filter should be installed upstream of the MFM//MFC, and a back pressure valve (or other throttling device) and a pressure gauge should be installed downstream to ensure the proper working pressure difference of the MFM/MFC.

  (8) For gases such as silane that easily form crystals when exposed to air, special attention should be paid to the tightness of the system (when detecting leaks, do not ignore the pressure reducer). If necessary, design a purge bypass for nitrogen purging or normal operation. Press and hold.

  (9) For systems with high-frequency sources, attention should be paid to shielding and grounding. Generally, single-point grounding is appropriate.

  (10) For high vacuum systems, the number of gas joints should be reduced as much as possible, and necessary joints should be strictly sealed or use VCR or other joints.

  (11) For the installation location of MFM/MFC, a horizontal location should be selected as far as possible, and the installation surface should be level. The installation location should be easy to load, unload, inspect, and adjust. Avoid impact as much as possible during installation, and the installation should be safe and reliable.

  (12) During use, if the process system is complex or special gases are used, special operating procedures should be established when the instrument's measurement and control system is activated.

  (13) If the zero point of the instrument is found to be offset during use, it can be adjusted through the zero adjustment hole on the outer cover, or by removing the outer cover for adjustment, but the range adjustment potentiometer should not be adjusted easily.

  The above is the "Common Faults of Thermal Gas Mass Flow Meter Controllers" shared by thermal gas mass flow meter manufacturers. Thank you for watching. If you have any questions, you can consult online or leave us a message. We will answer you wholeheartedly.

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